Two-axis crosstalk analysis of gimbal-less MEMS scanners with consideration of rotational alignment
Kwanghyun Kim, Seunghwan Moon, Jinhwan Kim, Yangkyu Park, Jong‐Hyun Lee
Topics & Concepts
GimbalMicroelectromechanical systemsCrosstalkScannerDecoupling (probability)OpticsPhysicsAcousticsEngineeringOptoelectronicsQuantum mechanicsControl engineeringAdvanced MEMS and NEMS TechnologiesAdvanced Measurement and Metrology TechniquesForce Microscopy Techniques and Applications