Selective electrochemical mechanical polishing of 4H–SiC surface employing porous material impregnated with electrolyte
Xiaozhe Yang, Xiaozhe Yang, Xu Yang, Xu Yang, Zhuangde Jiang, Kazuya Yamamura
Topics & Concepts
Materials scienceElectrolytePolishingSurface roughnessPorosityComposite materialAnodeElectrochemistryQuartzOxideChemical engineeringMetallurgyElectrodeEngineeringPhysical chemistryChemistryAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesDiamond and Carbon-based Materials Research