Comparative spectroscopic studies of MOCVD grown AlN films on Al2O3 and 6H–SiC
Junhua Yin, Daihua Chen, Hong Yang, Yao Liu, Devki N. Talwar, Tianlong He, Ian T. Ferguson, Kaiyan He, Lingyu Wan, Zhe Chuan Feng
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyX-ray photoelectron spectroscopyChemical vapor depositionSapphirePhotoluminescenceSubstrate (aquarium)Raman spectroscopyThin filmSurface roughnessAnalytical Chemistry (journal)EpitaxyLayer (electronics)Composite materialOptoelectronicsNanotechnologyChemical engineeringOpticsChemistryLaserOceanographyGeologyChromatographyEngineeringPhysicsGaN-based semiconductor devices and materialsZnO doping and propertiesMetal and Thin Film Mechanics