Development of an integrated physical vapour deposition and chemical vapour deposition system
Sangeeta S. Mundra, Sujit S. Pardeshi, Shivnanda S. Bhavikatti, Atul Nagras
Topics & Concepts
Deposition (geology)Chemical vapor depositionMaterials scienceCharacterization (materials science)Physical vapor depositionSubstrate (aquarium)Thin filmCombustion chemical vapor depositionLayer (electronics)NanotechnologyGrapheneChemical engineeringCarbon filmGeologyEngineeringSedimentOceanographyPaleontologyBiologyGraphene research and applicationsThermal properties of materialsCarbon Nanotubes in Composites