Modulation of Si on microstructure and tribo-mechanical properties of hydrogen-free DLC films prepared by magnetron sputtering
Chao-Qian Guo, Songsheng Lin, Di Gao, Qian Shi, Chunbei Wei, Mingjiang Dai, Yifan Su, Wei Xu, Peng Tang, Hong Li, Wei Wang, Xia-Gao Zhu
Topics & Concepts
Materials scienceMicrostructureSputter depositionX-ray photoelectron spectroscopyScanning electron microscopeNanoindenterComposite materialAmorphous solidSputteringRaman spectroscopyTribometerElastic modulusTribologyThin filmNanotechnologyCrystallographyOpticsChemical engineeringChemistryEngineeringPhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsTribology and Wear Analysis