Effect of incident angle on the microstructure proprieties of Cu thin film deposited on Si (001) substrate
H. Mes-adi, K. Saadouni, M. Mazroui
Topics & Concepts
Materials scienceMicrostructureThin filmSurface roughnessSubstrate (aquarium)Deposition (geology)Composite materialSurface finishResidual stressUltimate tensile strengthOpticsNanotechnologyBiologySedimentPhysicsGeologyOceanographyPaleontologyCopper Interconnects and ReliabilityMetal and Thin Film MechanicsSemiconductor materials and devices