Study of a platinum nanoparticle (Pt NP)/amorphous In-Ga-Zn-O (A-IGZO) thin-film-based ammonia gas sensor
Po‐Lin Chen, I-Ping Liu, Wei-Cheng Chen, Jing-Shiuan Niu, Wen-Chau Liu
Topics & Concepts
AmmoniaAmorphous solidMaterials sciencePlatinumFabricationEvaporationSputteringAmmonia gasNanoparticleThin filmSelectivityChemical engineeringPlatinum nanoparticlesNanotechnologyCatalysisChemistryOrganic chemistryPathologyMedicineAlternative medicineEngineeringThermodynamicsPhysicsGas Sensing Nanomaterials and SensorsZnO doping and propertiesTransition Metal Oxide Nanomaterials