Annealing atmosphere-dependent electrical characteristics and bias stability of N-doped InZnSnO thin film transistors
Jinbao Su, Hui Yang, Yaobin Ma, Li Ran, Lanchao Jia, Depeng Liu, Xiqing Zhang
Topics & Concepts
Thin-film transistorMaterials scienceAnnealing (glass)Threshold voltageOptoelectronicsAmorphous solidDopingTransmittanceThin filmSputter depositionTransistorSputteringComposite materialVoltageNanotechnologyElectrical engineeringCrystallographyEngineeringChemistryLayer (electronics)Thin-Film Transistor TechnologiesZnO doping and propertiesCCD and CMOS Imaging Sensors