Laboratory X-ray interferometry imaging with a fan-shaped source grating
Zhitian Shi, Konstantins Jefimovs, Lucia Romano, Joan Vila‐Comamala, Marco Stampanoni
Abstract
The orientation mismatch between the cone beam of an X-ray tube and the grating lines in a flat substrate remains a big challenge for laboratory grating-based X-ray interferometry, since it severely limits the imaging field of view. Here, we fabricated fan-shaped <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:msub> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">G</mml:mi> </mml:mrow> <mml:mn>0</mml:mn> </mml:msub> </mml:mrow> </mml:math> source gratings by modulating the electric field during the deep reactive ion etching of silicon. The gold electroplated fan-shaped <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:msub> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">G</mml:mi> </mml:mrow> <mml:mn>0</mml:mn> </mml:msub> </mml:mrow> </mml:math> grating (3.0 µm pitch) in a 20 keV interferometer improves the uniformity of the field of view with an increase of average visibility from 16.2% to 18.5% and a better angular sensitivity (by a factor 5.8) at the edges.