Structure and optical properties of the WO3 thin films deposited by the GLAD magnetron sputtering technique
Artur Rydosz, Katarzyna Dyndał, Kamila Kollbek, Wojciech Andrysiewicz, Maciej Sitarz, К. Marszałek
Topics & Concepts
Materials scienceThin filmSputter depositionSubstrate (aquarium)Tungsten trioxideDeposition (geology)SputteringEllipsometryCavity magnetronOptoelectronicsAnalytical Chemistry (journal)OpticsTungstenNanotechnologyMetallurgyChemistryOceanographyChromatographyPhysicsSedimentBiologyGeologyPaleontologySurface Roughness and Optical MeasurementsTransition Metal Oxide NanomaterialsOptical Coatings and Gratings