Piezoelectricity in <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si3.svg"><mml:mrow><mml:msub><mml:mi mathvariant="normal">Y</mml:mi><mml:mrow><mml:mn>0.09</mml:mn></mml:mrow></mml:msub><mml:msub><mml:mrow><mml:mi mathvariant="normal">A</mml:mi><mml:mi mathvariant="normal">l</mml:mi></mml:mrow><mml:mrow><mml:mn>0.91</mml:mn></mml:mrow></mml:msub><mml:mi mathvariant="normal">N</mml:mi></mml:mrow></mml:math> thin films
M. Schlögl, Michael Schneider, U. Schmid
Topics & Concepts
Materials scienceScandiumSputteringCrystallinityYttriumPiezoelectricityThin filmSputter depositionAnalytical Chemistry (journal)Composite materialNanotechnologyMetallurgyChemistryChromatographyOxideAcoustic Wave Resonator TechnologiesMetal and Thin Film MechanicsGaN-based semiconductor devices and materials