Structural and mechanical modifications of GaN thin films by swift heavy ion irradiation
S. Eve, Alexis Ribet, Jean‐Gabriel Mattei, C. Grygiel, Éric Hug, I. Monnet
Topics & Concepts
Materials scienceSwift heavy ionIrradiationNanoindentationAmorphous solidFluenceGallium nitrideSlip (aerodynamics)DislocationThin filmTransmission electron microscopyNucleationComposite materialIonCrystallographyNanotechnologyChemistryLayer (electronics)ThermodynamicsOrganic chemistryPhysicsNuclear physicsGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsIon-surface interactions and analysis