Design and Analysis of a Flexure-Based Parallel XY Stage Driven by Differential Piezo Forces
Kee-Bong Choi, Jaejong Lee, Geehong Kim, Hyungjun Lim, Soongeun Kwon, Sangchul Lee
Topics & Concepts
Differential (mechanical device)Stage (stratigraphy)Mechanical engineeringEngineeringMaterials scienceStructural engineeringComputer scienceAerospace engineeringGeologyPaleontologyPiezoelectric Actuators and ControlIterative Learning Control SystemsForce Microscopy Techniques and Applications