Corrosion behavior of Ta and TiN double-layer-coated SUS316L for PEMFC bipolar plates using plasma-enhanced atomic layer deposition and magnetron sputtering
Yujae Jang, Yangjae Kim, Wonyeop Jeong, Suhyuk Ko, Daniel Gil, Inyoung Jeong, MyungSeok Lee, Sangbong Ryu, Kye Hwan Jang, Suk Won
Topics & Concepts
TinMaterials scienceLayer (electronics)Sputter depositionCorrosionDeposition (geology)SputteringAtomic layer depositionPlasmaMetallurgyCavity magnetronAlloyComposite materialThin filmNanotechnologyPhysicsQuantum mechanicsPaleontologySedimentBiologyFuel Cells and Related MaterialsElectrocatalysts for Energy ConversionSemiconductor materials and devices