Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices
Troy Tharpe, Eitan Hershkovitz, Faysal Hakim, Honggyu Kim, Roozbeh Tabrizian
Topics & Concepts
ResonatorMaterials scienceOptoelectronicsNanoelectromechanical systemsCoupling coefficient of resonatorsElectronic engineeringNanotechnologyEngineeringNanomedicineNanoparticleFerroelectric and Negative Capacitance DevicesFerroelectric and Piezoelectric MaterialsAcoustic Wave Resonator Technologies