Effects of gradient structure and modulation period of Ta/TaN/Ta(C,N)/Ta-DLC multilayer coatings prepared by HiPIMS
Qizhong Li, Tao Huang, Mai Yang, Tenghua Gao, Baifeng Ji, Song Zhang, Lianmeng Zhang, Rong Tu
Topics & Concepts
Materials scienceCoatingComposite materialTribologyHigh-power impulse magnetron sputteringAmorphous solidMicrostructureDiamond-like carbonSputter depositionGrain sizeCarbideLayer (electronics)SputteringThin filmNanotechnologyCrystallographyChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchTribology and Wear Analysis