High P-type doping control and characterization of AlGaN thin films grown by PA-MBE on silicon substrates
A. SH. Hussein, Mohammed H. Jawad, Rajaa Obayes Abdulsada, Muqdad S. Abdulla, Sajjad N. Mahdi
Topics & Concepts
Materials scienceOhmic contactDopingOptoelectronicsAnnealing (glass)SiliconMolecular beam epitaxyThin filmElectrical resistivity and conductivityFabricationEpitaxyCharacterization (materials science)Monocrystalline siliconHall effectConductivityContact resistanceCrystal (programming language)NitrideSilicon nitrideCrystal growthMetalorganic vapour phase epitaxySingle crystalGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesZnO doping and properties