High-precision and high-efficiency fabrication of blazed grating by ultrasonic-assisted ultraprecision planing
Ziqi Chen, Qian Yu, Keita Shimada, Peng Liu, Yupeng He, Yao Hu, Xibin Wang, Tianfeng Zhou, Masayoshi Mizutani
Topics & Concepts
Materials scienceGratingBlazed gratingOpticsFabricationMachiningVibrationOptoelectronicsDiffraction gratingAcousticsMetallurgyAlternative medicineMedicinePathologyPhysicsAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsAdvanced Measurement and Metrology Techniques