Litcius/Paper detail

Material removal characteristic of single abrasive scratching 4H–SiC crystal with different crystal surface

Jun Li, Hongyan Zhao, Xiujuan Gao, Lei He, Daqing Zhou

2024Materials Science in Semiconductor Processing15 citationsDOI

Topics & Concepts

ScratchingMaterials scienceAbrasiveCrystal (programming language)Composite materialCrystallographyMetallurgyProgramming languageChemistryComputer scienceAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics