Investigation of surface integrity and material removal mechanism of single-crystal Si subjected to micro-laser-assisted machining
Ruiwen Geng, Xiaojing Yang, Qiming Xie, Ruoyin Zhang, Wanqing Zhang, Hongfang Qiu, Rui Mu, Weisheng Yang, Rui Li
Topics & Concepts
MachiningMaterials scienceSurface integrityBrittlenessSurface roughnessDiamond turningResidual stressComposite materialOpticsMetallurgyPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques