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Investigation of surface integrity and material removal mechanism of single-crystal Si subjected to micro-laser-assisted machining

Ruiwen Geng, Xiaojing Yang, Qiming Xie, Ruoyin Zhang, Wanqing Zhang, Hongfang Qiu, Rui Mu, Weisheng Yang, Rui Li

2021Infrared Physics & Technology45 citationsDOI

Topics & Concepts

MachiningMaterials scienceSurface integrityBrittlenessSurface roughnessDiamond turningResidual stressComposite materialOpticsMetallurgyPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques
Investigation of surface integrity and material removal mechanism of single-crystal Si subjected to micro-laser-assisted machining | Litcius