Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer
Xuan Luc Le, Ki-Hoon Kim, Sung‐Hoon Choa
Topics & Concepts
AccelerometerMicroelectromechanical systemsMaterials scienceCapacitive sensingSiliconPiezoelectric accelerometerStress (linguistics)Deformation (meteorology)AcousticsFrequency responseChipOptoelectronicsComposite materialElectrical engineeringPhysicsEngineeringDielectricQuantum mechanicsPiezoelectric coefficientLinguisticsPhilosophyAdvanced MEMS and NEMS TechnologiesAdvanced Fiber Optic SensorsMechanical and Optical Resonators