Improving polishing efficiency of RB-SiC through femtosecond laser pretreatment
Huan Chen, Chaoyang Wei, Zhen Cao, Xiaocong Peng, Zhigang Jiang, Songlin Wan, Jianda Shao
Topics & Concepts
PolishingMaterials scienceFemtosecondAbrasiveSubstrate (aquarium)LaserChemical-mechanical planarizationLayer (electronics)Surface roughnessSiliconFabricationComposite materialOptoelectronicsOpticsAlternative medicineGeologyMedicineOceanographyPhysicsPathologyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis