A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems
Lihui Wu, Zhongwei Zhang, Jie Zhang, Ray Y. Zhong, Junliang Wang
Topics & Concepts
Semiconductor device fabricationMarkov chainMarkov processWafer fabricationComputer scienceDiscretizationProcess (computing)Blocking (statistics)Markov modelWaferEngineeringSimulationReliability engineeringComputer networkMathematicsElectrical engineeringStatisticsMathematical analysisOperating systemMachine learningAdvanced Manufacturing and Logistics OptimizationScheduling and Optimization AlgorithmsElevator Systems and Control