Embedded microfluidic cooling with compact double H type manifold microchannels for large-area high-power chips
Yu‐Chi Yang, Jianyu Du, Motong Li, Weihao Li, Qi Wang, Bo Wen, Chi Zhang, Yufeng Jin, Wei Wang
Topics & Concepts
Materials scienceReynolds numberMicrofluidicsNusselt numberWaferThermal resistanceSiliconChipDissipationMechanicsOptoelectronicsThermodynamicsHeat transferNanotechnologyElectrical engineeringTurbulenceEngineeringPhysicsHeat Transfer and OptimizationHeat Transfer MechanismsHeat Transfer and Boiling Studies