Analytical modeling of the stress field in scratching anisotropic single-crystal silicon
Long Li, Peiqi Ge
Topics & Concepts
Materials scienceScratchingBrittlenessStress fieldSiliconComposite materialNucleationCrystalline siliconResidual stressStress (linguistics)Single crystalAnisotropyStructural engineeringOpticsCrystallographyMetallurgyFinite element methodChemistryLinguisticsEngineeringPhilosophyOrganic chemistryPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics