Synchrotron X-ray Topography Studies of Dislocation Behavior During Early Stages of PVT Growth of 4H-SiC Crystals
Tuerxun Ailihumaer, Hongyu Peng, Yafei Liu, Balaji Raghothamachar, Michael Dudley, Gilyong Chung, Ian Manning, Edward Sanchez
Topics & Concepts
Materials scienceSynchrotronDislocationWaferCrystallographyCrystal (programming language)Seed crystalSilicon carbideCrystal growthBasal planeDiffractionCondensed matter physicsOpticsSingle crystalOptoelectronicsComposite materialChemistryPhysicsComputer scienceProgramming languageSilicon Carbide Semiconductor TechnologiesSilicon and Solar Cell TechnologiesThin-Film Transistor Technologies