Large-area commercial-grating-quality subwavelength periodic ripples on silicon efficiently fabricated by gentle ablation with femtosecond laser interference via two cylindrical lenses

Kaiqiang Cao, Long Chen, Haochen Wu, Jukun Liu, K. L. Cheng, Yanli Li, Yingjie Xia, Chaopeng Feng, Shian Zhang, Donghai Feng, Zhenrong Sun, Tianqing Jia