Microfluidic silicon interposer for thermal management of GaN device integration
Miao Yu, Hao Zhang, Min Huang, Hongze Zhang, Jian Zhu
Topics & Concepts
Materials scienceMicrochannelOptoelectronicsMicroelectronicsMiniaturizationThermal resistanceSiliconInterposerMicrosystemMicrofluidicsChipWater coolingHeat transferMechanical engineeringNanotechnologyElectrical engineeringMechanicsEngineeringPhysicsEtching (microfabrication)Layer (electronics)Heat Transfer and OptimizationHeat Transfer and Boiling StudiesHeat Transfer Mechanisms