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Reversible bonding of microfluidics: Review and applications

Yilei Zhang, Kaixin Sun, Yu Xie, Kun Liang, Jing Zhang, Yiqiang Fan

2023Review of Scientific Instruments12 citationsDOIOpen Access PDF

Abstract

With the development of microfluidic technology, new materials and fabrication methods have been constantly invented in the field of microfluidics. Bonding is one of the key steps for the fabrication of enclosed-channel microfluidic chips, which have been extensively explored by researchers globally. The main purpose of bonding is to seal/enclose fabricated microchannels for subsequent fluid manipulations. Conventional bonding methods are usually irreversible, and the forced detachment of the substrate and cover plate may lead to structural damage to the chip. Some of the current microfluidic applications require reversible bonding to reuse the chip or retrieve the contents inside the chip. Therefore, it is essential to develop reversible bonding methods to meet the requirements of various applications. This review introduces the most recent developments in reversible bonding methods in microfluidics and their corresponding applications. Finally, the perspective and outlook of reversible bonding technology were discussed in this review.

Topics & Concepts

MicrofluidicsNanotechnologyFabricationMaterials scienceReuseMicrofluidic chipAnodic bondingComputer scienceEngineeringWaferMedicineAlternative medicinePathologyWaste managementMicrofluidic and Capillary Electrophoresis ApplicationsNanofabrication and Lithography TechniquesAdvanced Sensor and Energy Harvesting Materials
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