Solution-processed ITO thin-film transistors with doping of gallium oxide show high on-off ratios and work at 1 mV drain voltage
Ya‐Fang Wang, Zhaogui Wang, Kairong Huang, Xiaoci Liang, Chenning Liu, Chenning Liu, Changdong Chen, Chuan Liu, Chuan Liu
Abstract
Indium tin oxide (ITO) is generally used as an electrode material but has recently been demonstrated to be a competitive candidate for use in semiconductor layers in high-performance thin-film transistors (TFTs), due to its high mobility and strong resistance to wet-etching. Here, we demonstrate TFTs using solution-processed, ultra-thin ITO films with outstanding switching performance. These devices exhibit a mobility of up to 15 cm2 V−1 s−1 and a high on-off ratio of 108. Because the device exhibits significant instability under stress tests, moderate doping with Ga as a dopant is introduced to form Ga-doped ITO TFTs. The resulting device has much enhanced stability, near-zero turn-on voltage, and a high on-off current ratio of 108. Through further involvement of an AlOx dielectric layer, the Ga-doped ITO TFTs exhibit a high apparent mobility of more than 40 cm2 V−1 s−1 and operate at small gate voltages (3 V). Remarkably, the device maintains an on-off ratio of over 104 at drain voltages as small as 1 mV.