Single-pulse femtosecond laser ablation of monocrystalline silicon: A modeling and experimental study
Chong Chen, Fan Zhang, Yang Zhang, Xin Xiong, Bing‐Feng Ju, Hailong Cui, Yuan-Liu Chen
Topics & Concepts
Monocrystalline siliconFemtosecondLaserMaterials scienceSiliconLaser ablationOpticsAblationVisualizationFemtosecond pulse shapingPulse (music)OptoelectronicsPhysicsComputer scienceEngineeringDetectorAerospace engineeringArtificial intelligenceLaser Material Processing TechniquesOcular and Laser Science ResearchLaser-induced spectroscopy and plasma