Mechanism and experimental study of photoelectro-Fenton composite magnetorheological polishing
Zhijun Chen, Qiusheng Yan, Jisheng Pan, Kaiyuan Luo, Jingyuan Zheng, Hanhao Liu
Topics & Concepts
Materials scienceChemical-mechanical planarizationWaferPolishingMagnetorheological fluidComposite numberSlurryIonElectric fieldElectrochemistryOxideChemical engineeringSurface roughnessCorrosionNanoparticleChemical stabilityComposite materialElectrodeNanotechnologyMetallurgyMagnetic fieldChemistryOrganic chemistryEngineeringQuantum mechanicsPhysicsPhysical chemistryAdvanced Surface Polishing TechniquesVascular Malformations Diagnosis and TreatmentDiamond and Carbon-based Materials Research