Molecular dynamics simulations of scratching characteristics in vibration-assisted nano-scratch of single-crystal silicon
Yue Chen, Zhongwei Hu, Jianfeng Jin, Lun Li, Yiqing Yu, Qing Peng, Xipeng Xu
Topics & Concepts
ScratchMaterials scienceVibrationGrindingAnisotropyMachiningBrittlenessComposite materialAmorphous solidMolecular dynamicsMonocrystalline siliconSiliconNano-Deformation (meteorology)OpticsMetallurgyAcousticsCrystallographyChemistryComputational chemistryPhysicsAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsDiamond and Carbon-based Materials Research