Fast-response MEMS xylene gas sensor based on CuO/WO3 hierarchical structure
Mengmeng Guo, Na Luo, Yang Chen, Fan Yu, Xiaohong Wang, Jiaqiang Xu
Topics & Concepts
Microelectromechanical systemsMaterials scienceSelectivityXyleneHeterojunctionChemical engineeringResponse timeEtching (microfabrication)NOxNanotechnologyOptoelectronicsChemistryCatalysisComputer sciencePhysical chemistryOrganic chemistryBenzeneCombustionComputer graphics (images)EngineeringLayer (electronics)Gas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors