Analysing trimethylaluminum infiltration into polymer brushes using a scalable area selective vapor phase process
Matthew Snelgrove, Caitlin McFeely, Kyle Shiel, G. Hughes, Pravind Yadav, Conan Weiland, J. C. Woicik, Pierre Giovanni Mani-González, Ross Lundy, Michael A. Morris, E. McGlynn, Robert O’Connor
Abstract
This work identifies the critical factors when developing a polymer brush vapor phase infiltration process, while also demonstrating the use of novel pyridines for area selective purposes.
Topics & Concepts
Infiltration (HVAC)Vapor phasePolymerMaterials scienceProcess (computing)NanotechnologyChemical engineeringComputer scienceComposite materialEngineeringPhysicsThermodynamicsOperating systemSemiconductor materials and devicesPolymer Surface Interaction StudiesAnalytical Chemistry and Sensors