Effects of HiPIMS discharges and annealing on Cr-Al-C thin films
Michaël Ougier, Alexandre Michau, Frédéric Schuster, Hicham Maskrot, Michel L. Schlegel
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceAnnealing (glass)Amorphous solidAnalytical Chemistry (journal)Sputter depositionThin filmCoatingChemical engineeringSputteringComposite materialMetallurgyCrystallographyNanotechnologyChemistryChromatographyEngineeringMXene and MAX Phase MaterialsAluminum Alloys Composites PropertiesAdvanced materials and composites