Transient analysis and process optimization of the spatial atomic layer deposition using the dynamic mesh method
Wentao Cong, Zoushuang Li, Kun Cao, Guang Feng, Rong Chen
Topics & Concepts
Atomic layer depositionSubstrate (aquarium)Deposition (geology)Flow (mathematics)Process (computing)Biological systemTransient (computer programming)Computer scienceMaterials scienceCombingLayer (electronics)Thin filmField (mathematics)MechanicsVolumetric flow rateNanotechnologySimulationComposite materialPhysicsMathematicsPaleontologySedimentOceanographyGeologyOperating systemPure mathematicsBiologySemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignDiamond and Carbon-based Materials Research