Atom probe tomography quantification of carbon in silicon
Paul Dumas, S. Duguay, J. Borrel, Fanny Hilario, D. Blavette
Topics & Concepts
Atom probeSiliconDopantMicroelectronicsIonCarbon fibersElectric fieldAnalytical Chemistry (journal)Atom (system on chip)Ion implantationMaterials scienceStoichiometryDiffusionCarbon atomChemistryAtomic physicsDopingNanotechnologyPhysical chemistryOptoelectronicsPhysicsOrganic chemistryThermodynamicsQuantum mechanicsComposite materialEmbedded systemChromatographyTransmission electron microscopyAlkylComposite numberComputer scienceAdvanced Materials Characterization TechniquesMicrostructure and mechanical propertiesForce Microscopy Techniques and Applications