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An ultra-high low-frequency SPL piezoelectric MEMS loudspeaker based on sputtered PZT

Qincheng Zheng, Ke Cao, Chenyu Bai, Xudong Ma, Ning Deng, Yulang Cheng, Yao Lu, Huikai Xie

2025Sensors and Actuators A Physical10 citationsDOI

Topics & Concepts

LoudspeakerPiezoelectricityMicroelectromechanical systemsMaterials scienceAcousticsPMUTLow frequencyOptoelectronicsElectrical engineeringComputer scienceComposite materialEngineeringPhysicsTelecommunicationsAcoustic Wave Resonator TechnologiesAdvanced MEMS and NEMS TechnologiesMechanical and Optical Resonators
An ultra-high low-frequency SPL piezoelectric MEMS loudspeaker based on sputtered PZT | Litcius