Surface corrosion inhibition mechanism of sarcosine as a green novel inhibitor on a novel barrier layer material of cobalt in copper film CMP for GLSI
Yinchan Zhang, Xinhuan Niu, Jiakai Zhou, Jianchao Wang, Chenghui Yang, Ziyang Hou, Yebo Zhu, Li Huang
Topics & Concepts
PolishingMaterials scienceSarcosineCorrosionCobaltCopperX-ray photoelectron spectroscopyElectrochemistryChemical-mechanical planarizationScanning electron microscopeChemical engineeringAnodeComposite materialMetallurgyChemistryElectrodeGlycineAmino acidPhysical chemistryEngineeringBiochemistryAdvanced Surface Polishing TechniquesAdvanced materials and compositesIntegrated Circuits and Semiconductor Failure Analysis