Reactive ion etched, self-aligned, selective area poly-Si/SiO2 passivated contacts
David L. Young, Kejun Chen, San Theingi, Vincenzo LaSalvia, David R. Diercks, Harvey Guthrey, William Nemeth, Matthew Page, Pauls Stradins
Topics & Concepts
PassivationMaterials scienceOptoelectronicsEtching (microfabrication)Reactive-ion etchingLayer (electronics)Absorption (acoustics)Current densityDry etchingDeposition (geology)NanotechnologyComposite materialQuantum mechanicsSedimentPaleontologyPhysicsBiologySemiconductor materials and devicesSilicon and Solar Cell TechnologiesIntegrated Circuits and Semiconductor Failure Analysis