Impact of an annealing atmosphere on band-alignment of a plasma-enhanced atomic layer deposition-grown Ga2O3/SiC heterojunction
Yi Shen, An-Feng Wang, Hong-Ping Ma, Xin Qi, Qilong Yuan, Mingyang Yang, Mengting Qiu, Bingxue Zhang, Nan Jiang, Qingchun Jon Zhang, Qingchun Jon Zhang
Topics & Concepts
Materials scienceAtomic layer depositionHeterojunctionAnnealing (glass)PlasmaAtmosphere (unit)OptoelectronicsDeposition (geology)Layer (electronics)NanotechnologyMetallurgyMeteorologySedimentBiologyPhysicsPaleontologyQuantum mechanicsGa2O3 and related materialsElectronic and Structural Properties of OxidesZnO doping and properties