Sputter deposition of WNx thin films by helicon-wave-excited argon plasma with N2 seeding
Tianyuan Huang, Peiyu Ji, Jianjun Huang, Bin Yu, Xuemei Wu
Topics & Concepts
Materials scienceHeliconSputteringAnalytical Chemistry (journal)Thin filmArgonSputter depositionPlasmaNanotechnologyAtomic physicsPhysicsChemistryChromatographyQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research