Tribological and mechanical properties of ZrxNy films obtained by HiPIMS in DOMS mode
José D. Castro, Muhammad Ans, Diogo Cavaleiro, S. Carvalho
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceTribologyComposite materialNanoindentationSputter depositionMetallurgyThin filmSputteringNanotechnologyMetal and Thin Film MechanicsMarine Biology and Environmental ChemistryDiamond and Carbon-based Materials Research