Atomic layer deposition for membrane modification, functionalization and preparation: A review
Sen Xiong, Xiaofeng Qian, Zhaoxiang Zhong, Yong Wang
Topics & Concepts
MembraneAtomic layer depositionSurface modificationChemical engineeringFoulingGas separationWettingMaterials scienceAdsorptionNanotechnologyChemistryLayer (electronics)Organic chemistryBiochemistryEngineeringSemiconductor materials and devicesElectronic and Structural Properties of OxidesMembrane Separation Technologies