Metastable Ta<sub>2</sub>N<sub>3</sub> with highly tunable electrical conductivity <i>via</i> oxygen incorporation
Chang‐Ming Jiang, Laura I. Wagner, Matthew K. Horton, Johanna Eichhorn, Tim Rieth, Viktoria F. Kunzelmann, Max Kraut, Yanbo Li, Kristin A. Persson, Ian D. Sharp
Abstract
Metastable Ta<sub>2</sub>N<sub>3</sub> with bixbyite structure is directly deposited by reactive magnetron sputtering. Concerted experimental and computational efforts reveal the crucial role of oxygen impurity in both the synthesis and in tuning the electronic structure.
Topics & Concepts
MetastabilityBixbyiteMaterials scienceImpurityOxygenElectrical resistivity and conductivityConductivityChemical physicsSputteringCrystallographyNanotechnologyPhysical chemistryOxideThin filmMetallurgyChemistryPhysicsQuantum mechanicsOrganic chemistryMXene and MAX Phase MaterialsMachine Learning in Materials ScienceFerroelectric and Negative Capacitance Devices