Origins of Ultrafast Pulse Laser-Induced Nano Straight Lines with Potential Applications in Detecting Subsurface Defects in Silicon Carbide Wafers
Tan Shu, Feng Liu, Shuai Chen, Xingtao Liu, Chen Zhang, Gary J. Cheng
Topics & Concepts
Materials scienceWaferLaserSilicon carbideUltrashort pulseOptoelectronicsLaser ablationSiliconFemtosecondFluenceSemiconductorAmorphous solidDislocationOpticsComposite materialCrystallographyChemistryPhysicsLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis