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Influence of layer number on microstructure, mechanical properties and wear behavior of the TiN/Ti multilayer coatings fabricated by high-power magnetron sputtering deposition

Liyuan Sheng, Yinan Xiao, Cheng Jiao, Beining Du, Yueming Li, Zhongzhen Wu, Longquan Shao

2021Journal of Manufacturing Processes84 citationsDOI

Topics & Concepts

TinMaterials scienceMicrostructureLayer (electronics)CoatingComposite materialSputter depositionSputteringElastic modulusMetallurgyThin filmNanotechnologyMetal and Thin Film MechanicsMXene and MAX Phase MaterialsBoron and Carbon Nanomaterials Research
Influence of layer number on microstructure, mechanical properties and wear behavior of the TiN/Ti multilayer coatings fabricated by high-power magnetron sputtering deposition | Litcius