X-Ray diffraction analysis and modeling of the depth profile of lattice strains in AlGaN stacks
David Rafaja, P. Fischer, M. Barchuk, Mykhaylo Motylenko, Christian Röder, Sven Besendörfer, Elke Meißner
Topics & Concepts
Reciprocal latticeMaterials scienceMicrostructureLattice (music)DiffractionRaman spectroscopyLattice constantCondensed matter physicsEpitaxyTransmission electron microscopyWaferCrystallographyOpticsComposite materialOptoelectronicsChemistryNanotechnologyLayer (electronics)PhysicsAcousticsGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsAcoustic Wave Resonator Technologies