Investigation on Electrical Enhanced Photocatalysis Polishing of Single-Crystal Silicon Carbide Substrates
Xingjun Gao, Xiang Li, Yan He, Lin Fan, Meiling Tang
Topics & Concepts
PolishingChemical-mechanical planarizationMaterials scienceAbrasiveSilicon carbideSlurryCrystal (programming language)Composite materialOxidizing agentMetallurgyChemistryProgramming languageComputer scienceOrganic chemistryAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesSilicon Nanostructures and Photoluminescence